Wafer processing and prosess development of 1 Nm CMOS:oxidation (Pemindahan Teknologi dari Frunhofer Institute,Dresden,Germany)8.3.1995-3.6.1995

Bibliographic Details
Main Author: ASBAN bin Dolah
Format: Book
Published: Dresden : Fraunhofer Institute , 1995
Subjects:

MARC

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090 0 0 |a D621.3815   |b ASB 
100 1 0 |a ASBAN bin Dolah 
245 1 0 |a Wafer processing and prosess development of 1 Nm CMOS:oxidation (Pemindahan Teknologi dari Frunhofer Institute,Dresden,Germany)8.3.1995-3.6.1995   |c Asban b Dolah. 
260 0 0 |a Dresden :   |b Fraunhofer Institute ,   |c 1995 
300 |a 20v.p. ;   |c 29cm. 
500 0 0 |a Course report 
650 0 0 |a Integrated circuits-wafer-scale integration-Dissertations,thesis,etc. 
650 0 0 |a Oxidation-Dissertations,thesis,etc. 
999 |a D000002184   |b THESIS AND DISSERTATIONS   |c REFERENCE   |e Default branch