Significance of post oxidation annelaing (POA) and post metallization annealing (PMA) on the capacitance-voltage characterization of Si3N4 MOS capacitor

Significance of post oxidation annelaing (POA) and post metallization annealing (PMA) on the capacitance-voltage characterization of Si3N4 MOS capacitor

Bibliographic Details
Main Author:	ROSMINAZUIN binti Ab Rahim
Format:	Book
Published:	Bangi : Universiti Kebangsaan Malaysia , 2004

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